Fabrication process development for superconducting VLSI circuits: minimizing plasma charging damage

VLSI Fabrication Process

VLSI stands for "Very Large Scale Integration". This is the field which involves packing more and more logic devices into smaller and smaller areas. Thanks to VLSI, circuits that would have taken boardfuls of space can now be put into a small space few millimeters across! This has opened up a big opportunity to do things that were not possible before. VLSI circuits are everywhere ... your compu...

Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation

We describe the recent progress on a Nb nine-layer fabrication process for large-scale single flux quantum (SFQ) circuits. A device fabricated in this process is composed of an active layer including Josephson junctions (JJ) at the top, passive transmission line (PTL) layers in the middle, and a DC power layer at the bottom. We describe the process conditions and the fabrication equipment. We u...

Reordering Algorithm for Minimizing Test Power in VLSI Circuits

Power consumption has become a crucial concern in Built In Self Test (BIST) due to the switching activity in the circuit under test(CUT). In this paper we present a novel method which aims at minimizing the total power consumption during testing. This is achieved by minimizing the switching activity in the circuit by reducing the Hamming Distance between successive test vectors. In this method ...

Optimized fabrication process for nanoscale Josephson junctions used in superconducting quantum circuits

Fabrication Technology of and Symmetry Breaking in Superconducting Quantum Circuits

Superconducting quantum circuits are promising systems for experiments testing fundamental quantum mechanics on a macroscopic scale and for applications in quantum information processing. We report on the fabrication and characterization of superconducting flux qubits, readout dc SQUIDs, on-chip shunting capacitors, and high-quality coplanar waveguide resonators. Furthermore, we discuss the tun...